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2
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How does a MEMS pressure sensor work?

How does it work, I hear it works on a small chip, but how does such a small device detect pressure? Can anyone provide me a simple diagram? Can anyone provide a simplified circuit diagram of how the MEMS chip work?
Asked on December 26, 2009, 1:47 by MEMS
1
votes
0
answers
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How do i calculate the normalized power for an optical mems based pressure sensor?

I need to plot the output characteristic of a ring resonator(Optical-MEMS) based pressure sensor). For that i need the formula to calculate normalized power as my 'y' axis variable. The 'x' axis variable is wavelength in microns. I can make design as
Asked on December 26, 2009, 1:40 by MEMS