anisotropic etch of wafer

Can anybody please suggest from where can I get help for mathematical problem of anisotropic etch (100) wafer?

• anisotropic
• etch
• mathematical
• microfabrication
• modelling
• nanofabrication

What was the main reason for using Polysilicon rather than other materials for building MEMS structures?

What are the advantages of polysilicon?

• materials
• MEMS fabrication
• microfabrication
• polysilicon
• process