actuator

I could not do this math problem of pull in voltage of an actuator .I am giving the link .Can anybody pls help to solve it .It is urgent ... http://www.kaajakari.net/~ville/research/tutorials/pull_in_tutorial.pdf

Referance book

Can anybody please suggest some reference book from where I can practice MEMs related mathematical example and exercise for exam purpose ?

anisotropic etch of wafer

Can anybody please suggest from where can I get help for mathematical problem of anisotropic etch (100) wafer?

• anisotropic
• etch
• mathematical
• microfabrication
• modelling
• nanofabrication

Q factor in accelerometers

Why in this article about accelerometers, does the author write that the quality factor Q must be equal to 2√2? I refer to the "assumptions and limitations" section, when he says that the accelerometer has to be critically damped; wouldn't Q

• accelerometers
• Q factor

Damping for perforated mass

i m desinging single axis accelerometer for out of plane axis using metals mumps. the damping formula which u have given, gives me very high value of damping. the system is overdamped with dampng co efficeint of 400. my first question is how to calc

• damping co efficient

Where can I get a pulse forming network, a pulse laser head, mems mirrors, and galvano mirrors?

If you know of any store, website or other place tat sells 1 of these items, I'd greatly appreciate it! Thanks!

• galvano mirrors
• MEMS
• mems mirrors
• pulse laser

How does a MEMS pressure sensor work?

How does it work, I hear it works on a small chip, but how does such a small device detect pressure? Can anyone provide me a simple diagram? Can anyone provide a simplified circuit diagram of how the MEMS chip work?

• circuit
• design
• MEMS
• pressure sensor

How to model dome of mems encapsulation with thickness 250um, rdius 3010um,lateral length 2400um?

3d modeling using matlab, notice that the dome encapsulation have free space for mems movements part at the centre bottom of dome. any body can help me..?

• matlab
• MEMS
• model dome
• modeling

How do i calculate the normalized power for an optical mems based pressure sensor?

I need to plot the output characteristic of a ring resonator(Optical-MEMS) based pressure sensor). For that i need the formula to calculate normalized power as my 'y' axis variable. The 'x' axis variable is wavelength in microns. I can make design as

• design
• Optical-MEMS
• pressure sensor

What was the main reason for using Polysilicon rather than other materials for building MEMS structures?

What are the advantages of polysilicon?

• materials
• MEMS fabrication
• microfabrication
• polysilicon
• process