How does a MEMS pressure sensor work?

How does it work, I hear it works on a small chip, but how does such a small device detect pressure? Can anyone provide me a simple diagram? Can anyone provide a simplified circuit diagram of how the MEMS chip work?

• circuit
• design
• MEMS
• pressure sensor

What was the main reason for using Polysilicon rather than other materials for building MEMS structures?

What are the advantages of polysilicon?

• materials
• MEMS fabrication
• microfabrication
• polysilicon
• process

Where can I get a pulse forming network, a pulse laser head, mems mirrors, and galvano mirrors?

If you know of any store, website or other place tat sells 1 of these items, I'd greatly appreciate it! Thanks!

• galvano mirrors
• MEMS
• mems mirrors
• pulse laser

How can I measure the fluid flow in microfluidic channel?

Hello MEMS community, I want to measure the fluid flow velocity inside microfluidic channel. Is there any standard measurements equipment that I can use? Any help will be much appreciated. Thanks Mario

• Fluid flow
• Lab on chip
• microchannel
• microfluidic
• nanotechnology
• setup
• velocity measurements

what is the subsitute for micro-niddle ?

Recently micro-niddle have been in the limelight for percutaneous drug delivery in medical and cosmetic field. But, micro-niddle have an inevitable disadvantage that caused pain. For the purpose of percutaneous drug delivery, what is the substite

How do i calculate the normalized power for an optical mems based pressure sensor?

I need to plot the output characteristic of a ring resonator(Optical-MEMS) based pressure sensor). For that i need the formula to calculate normalized power as my 'y' axis variable. The 'x' axis variable is wavelength in microns. I can make design as

• design
• Optical-MEMS
• pressure sensor