How does a MEMS pressure sensor work?
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How does it work, I hear it works on a small chip, but how does such a small device detect pressure? Can anyone provide me a simple diagram?
Can anyone provide a simplified circuit diagram of how the MEMS chip work?
Can anyone provide a simplified circuit diagram of how the MEMS chip work?
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It works using a diaphragm and a strain gage, take a look at the picture using the link below. The chip measures small changes in the electrical resistance of the strain gage due to expansion/compression and correlates it to the appropriate pressure. http://www.freescale.com/webapp/sps/site/overview.jsp?code=SNSMEMSOVERVIEW
